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Foundations of MEMS is the first entry-level text of its kind for systematically teaching the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology - all in a time-efficient and methodical manner. A wealth of examples and problems solidify students' understanding of abstract concepts and provide ample opportunities for practicing critical thinking.
For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals. Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology - all in a time-efficient and methodical manner. A wealth of examples and problems solidify students' understanding of abstract concepts and provide ample opportunities for practicing critical thinking.
For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals. Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology — all in a time-efficient and methodical manner. A wealth of examples and problems solidify students' understanding of abstract concepts and provide ample opportunities for practicing critical thinking.
It is a real pleasure to write the Foreword for this book, both because I have known and respected its author for many years and because I expect this book’s publication will mark an important milestone in the continuing worldwide development of microsystems. By bringing together all aspects of microsystem design, it can be expected to facilitate the training of not only a new generation of engineers, but perhaps a whole new type of engineer – one capable of addressing the complex range of problems involved in reducing entire systems to the micro- and nano-domains. This book breaks down disciplinary barriers to set the stage for systems we do not even dream of today. Microsystems have a long history, dating back to the earliest days of mic- electronics. While integrated circuits developed in the early 1960s, a number of laboratories worked to use the same technology base to form integrated sensors. The idea was to reduce cost and perhaps put the sensors and circuits together on the same chip. By the late-60s, integrated MOS-photodiode arrays had been developed for visible imaging, and silicon etching was being used to create thin diaphragms that could convert pressure into an electrical signal. By 1970, selective anisotropic etching was being used for diaphragm formation, retaining a thick silicon rim to absorb package-induced stresses. Impurity- and electrochemically-based etch-stops soon emerged, and "bulk micromachining" came into its own.
This book gives freshman engineering students a solid foundation for all their future coursework. It provides an overview to the engineering profession and of the skills they will need to develop, as well as an introduction to fundamental engineering topics such as thermodynamics, rate processes, and Newton's laws. An important aspect of the book's approach is the method of Engineering Accounting, which casts the basic conservation laws (e.g., of energy or mass) as simple "accounting" procedures. This is a unifying concept that facilitates problem-solving across all engineering disciplines.
The third edition of Optical Networks continues to be the authoritative source for information on optical networking technologies and techniques. Componentry and transmission are discussed in detail with emphasis on practical networking issues that affect organizations as they evaluate, deploy, or develop optical networks. New updates in this rapidly changing technology are introduced. These updates include sections on pluggable optical transceivers, ROADM (reconfigurable optical add/drop multiplexer), and electronic dispersion compensation. Current standards updates such as G.709 OTN, as well as, those for GPON, EPON, and BPON are featured. Expanded discussions on multimode fiber with additional sections on photonic crystal and plastic fibers, as well as expanded coverage of Ethernet and Multiprotocol Label Switching (MPLS). This book clearly explains all the hard-to-find information on architecture, control and management. It serves as your guide at every step of optical networking-- from planning to implementation through ongoing maintenance. This book is your key to thoroughly understanding practical optical networks. In-depth coverage of optimization, design, and management of the components and transmission of optical networks. Filled with examples, figures, and problem sets to aid in development of dependable, speedy networks. Focuses on practical, networking-specific issues: everything you need to know to implement currently available optical solutions.