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Foundations of MEMS is the first entry-level text of its kind for systematically teaching the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology - all in a time-efficient and methodical manner. A wealth of examples and problems solidify students' understanding of abstract concepts and provide ample opportunities for practicing critical thinking.
It is a real pleasure to write the Foreword for this book, both because I have known and respected its author for many years and because I expect this book’s publication will mark an important milestone in the continuing worldwide development of microsystems. By bringing together all aspects of microsystem design, it can be expected to facilitate the training of not only a new generation of engineers, but perhaps a whole new type of engineer – one capable of addressing the complex range of problems involved in reducing entire systems to the micro- and nano-domains. This book breaks down disciplinary barriers to set the stage for systems we do not even dream of today. Microsystems have a long history, dating back to the earliest days of mic- electronics. While integrated circuits developed in the early 1960s, a number of laboratories worked to use the same technology base to form integrated sensors. The idea was to reduce cost and perhaps put the sensors and circuits together on the same chip. By the late-60s, integrated MOS-photodiode arrays had been developed for visible imaging, and silicon etching was being used to create thin diaphragms that could convert pressure into an electrical signal. By 1970, selective anisotropic etching was being used for diaphragm formation, retaining a thick silicon rim to absorb package-induced stresses. Impurity- and electrochemically-based etch-stops soon emerged, and "bulk micromachining" came into its own.
Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list. With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a MEMS solution, understand how other applications and companies have benefited from MEMS, and select and define a manufacturable MEMS process for your application. You discover how to use MEMS technology to enable new functionality, improve performance, and reduce size and cost. The book teaches you the capabilities and limitations of MEMS devices and processes, and helps you communicate the relative merits of MEMS to your company's management. From critical discussions on design operation and process fabrication of devices and systems, to a thorough explanation of MEMS packaging, this easy-to-understand book clearly explains the basics of MEMS engineering, making it an invaluable reference for your work in the field.
This book includes a set of rigorously reviewed world-class manuscripts addressing and detailing state-of-the-art research projects in the areas of Computer Science, Informatics, and Systems Sciences, and Engineering. It includes selected papers form the conference proceedings of the Ninth International Joint Conferences on Computer, Information, and Systems Sciences, and Engineering (CISSE 2013). Coverage includes topics in: Industrial Electronics, Technology & Automation, Telecommunications and Networking, Systems, Computing Sciences and Software Engineering, Engineering Education, Instructional Technology, Assessment, and E-learning. • Provides the latest in a series of books growing out of the International Joint Conferences on Computer, Information, and Systems Sciences, and Engineering; • Includes chapters in the most advanced areas of Computing, Informatics, Systems Sciences, and Engineering; • Accessible to a wide range of readership, including professors, researchers, practitioners and students.
Unlike books currently on the market, this book attempts to satisfy two goals: combine circuits and electronics into a single, unified treatment, and establish a strong connection with the contemporary world of digital systems. It will introduce a new way of looking not only at the treatment of circuits, but also at the treatment of introductory coursework in engineering in general. Using the concept of ''abstraction,'' the book attempts to form a bridge between the world of physics and the world of large computer systems. In particular, it attempts to unify electrical engineering and computer science as the art of creating and exploiting successive abstractions to manage the complexity of building useful electrical systems. Computer systems are simply one type of electrical systems. +Balances circuits theory with practical digital electronics applications. +Illustrates concepts with real devices. +Supports the popular circuits and electronics course on the MIT OpenCourse Ware from which professionals worldwide study this new approach. +Written by two educators well known for their innovative teaching and research and their collaboration with industry. +Focuses on contemporary MOS technology.
This book gives freshman engineering students a solid foundation for all their future coursework. It provides an overview to the engineering profession and of the skills they will need to develop, as well as an introduction to fundamental engineering topics such as thermodynamics, rate processes, and Newton's laws. An important aspect of the book's approach is the method of Engineering Accounting, which casts the basic conservation laws (e.g., of energy or mass) as simple "accounting" procedures. This is a unifying concept that facilitates problem-solving across all engineering disciplines.

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